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Synchrotron Radiation for Concave Surface

#0139


The use of whispering gallery effect for steering of synchrotron radiation beam and testing of supersmooth concave surfaces.

Tech Area / Field

  • PHY-PFA/Particles, Fields and Accelerator Physics/Physics

Status
8 Project completed

Registration date
22.12.1993

Completion date
09.02.1999

Senior Project Manager
Bunyatov K S

Leading Institute
FIAN Lebedev, Russia, Moscow

Supporting institutes

  • VNIITF, Russia, Chelyabinsk reg., Snezhinsk

Collaborators

  • European Synchrotron Radiation Facility, France, Grenoble

Project summary

The perspectives of the practical applications of the new trend of soft X-ray (SXR) optics based on the whispering gallery (WG) effect will be studied. The WG effect, consists in that the SXR beam falling tangentially on a concave surface slides along it and can be turned through any angle (up to 2 p) with the efficiency up to tens percents.

The final goals of our long-term activity are the following:

• Commercial availability of high efficient SXR optics of the WG type with the known and controllable optical characteristics for the steering of the wide-band synchrotron radiation (SR).

• Fabrication of the prototype of commercial X-ray device for the quantitative testing of super-smooth concave surfaces. Such a device is expected to be widely used in optical industry, fine mechanics, high technology and research & development in the surface and material science.

The present project which will be completed during 3 years is the first phase of our long-term activity in the field of practical applications of the WG effect in the SXR region. The goal of the present project consists in the development of scientific, technological and metrological basis of this long-term work.

We expect that successful completion of the present project will result in:

• The working model of the SXR WG optical system of the vertical SR beamline for proximity X-ray lithography. This allows one to refuse expensive development of vertical-plane displacement steppers and to use conventional industrial horizontal steppers which are much more simple, cheap and productive.

• The working model of the SXR WG optical system of the transportation of the SR beam to the second floor. This allows one to increase the number of SR beamlines, to gain laboratory space and to install additional scientific or technological equipment.

• The experimental methods of the investigations of the microroughness of concave surfaces as well as the design rules of X-ray equipment for the testing of super-smooth concave surfaces.

We anticipate that the availability of the effective wideband WG optics will extend the existing conception of the design of SR beamlines and, therefore, results obtained can be used directly for the development and design of new SR beamlines in the available synchrotron sources as well as for the development and design of special synchrotron sources for industrial applications.

At present the problem of the testing of the microroughness of concave surfaces is not solved completely and is extremely important for current optics and hightech machine industry. The proposed method is of especial interest because it allows one to test a whole concave surface with any size and figure and fabricated from any material.


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